Takumi Enhance-LO™ improves yield by automatically optimizing a layout against a set of preferred rules, as well as layout-related, yield-loss mechanisms—lithography and random particle issues! The only alternative to Takumi Enhance is manual repair of these layout issues—an impractical alternative!
Takumi Enhance-LO™ analyzes a layout geometrically and lithographically to detect potential yield limiters—layout hotspots! Using a built-in trade-off analysis, the hotspots are rated to identify the ones that need to be repaired. The repair is automated, thereby enhancing yield. The system, which is adaptable to new yield-loss mechanisms, can be applied to also address variations in dose and focus.
Key Product Features